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113 Publications
33 Journals
Prem Pal
Professor
Department of Physics
prem@phy.iith.ac.in (Work)
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Publications - 113
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Publications (113)
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Publications (113)
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Book
Silicon Wet Bulk Micromachining for MEMS
Prem Pal
and
K. Sato
2017 | Pan Stanford Publishing Pte. Ltd.
Articles
Silicon micromachining in 25 wt% TMAH without and with surfactant concentrations ranging from ppb to ppm
A. Ashok
and
Prem Pal
2017 | Springer Verlag
Conferences
Silicon anisotropic etching in ternary solution composed of TMAH+Triton+NH2OH
V. Swamalatha
,
A.V. Narasimha Rao
and
Prem Pal
2017 | Electrochemical Society Inc.
Articles
A measurement free pre-etched pattern to identify the <110> directions on Si{110} wafer
S.S. Singh
,
V.N. Avvaru
,
...
,
Ashok Kumar Pandey
and
Prem Pal
(5 authors)
2017 | Springer Verlag
Articles
Investigation of room temperature deposited silicon dioxide thin films for surface texturisation of monocrystalline {100} silicon
A. Ashok
and
Prem Pal
2016 | Institution of Engineering and Technology
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PDF
Publisher Copy
Articles
Fluctuations during anisotropic etching: Local recalibration and application to si{110}
M.A. Gosalvez
,
Y. Li
,
...
,
Prem Pal
,
...
,
Y. Xing
(6 authors)
2016 | Institute of Electrical and Electronics Engineers Inc.
Articles
Investigation of near room temperature magnetocaloric, magnetoresistance and bolometric properties of Nd0.5La0.2Sr0.3MnO3: Ag2O manganites
S. Vadnala
,
Prem Pal
and
Saket Asthana
2016 | Springer New York LLC
Articles
Precise identification of <1 0 0> directions on Si{0 0 1} wafer using a novel self-aligning pre-etched technique
S.S. Singh
,
S. Veerla
,
...
,
Ashok Kumar Pandey
and
Prem Pal
(5 authors)
2016 | Institute of Physics Publishing
Articles
Mass Sensitivity of Nonuniform Microcantilever Beams
S.S. Singh
,
Ashok Kumar Pandey
and
Prem Pal
2016 | American Society of Mechanical Engineers (ASME)
Reviews
Determination of precise crystallographic directions for mask alignment in wet bulk micromachining for MEMS
S.S. Singh
,
Ashok Kumar Pandey
,
...
,
Prem Pal
(5 authors)
2016 | Society of Micro and Nano Systems
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PDF
Publisher Copy
Conferences
Room temperature synthesis of silicon dioxide thin films for MEMS and silicon surface texturing
A. Ashok
and
Prem Pal
2015 | Institute of Electrical and Electronics Engineers Inc.
Articles
Pull-in analysis of non-uniform microcantilever beams under large deflection
S.S. Singh
,
Ashok Kumar Pandey
and
Prem Pal
2015 | American Institute of Physics Inc.
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PDF
Publisher Copy
Articles
Particle swarm optimization-based continuous cellular automaton for the simulation of deep reactive ion etching
Y. Li
,
M.A. Gosálvez
,
Prem Pal
,
...
,
Y. Xing
(5 authors)
2015 | Institute of Physics Publishing
Articles
Removal probability function for Kinetic Monte Carlo simulations of anisotropic etching of silicon in alkaline etchants containing additives
H. Zhang
,
Y. Xing
,
...
,
Prem Pal
and
K. Sato
(5 authors)
2015 | Elsevier
Articles
Synthesis of anodic oxide thin films on Si{100}wafers and their characterization in TMAH for MEMS
A. Ashok
and
Prem Pal
2015 | Electrochemical Society Inc.
Articles
Influence of A-site cation disorder on structural and magnetocaloric properties of Nd0.7-xLaxSr0.3MnO3 (x=0.0, 0.1, 0.2 & 0.3)
S. Vadnala
,
Prem Pal
and
Saket Asthana
2015 | Chinese Society of Rare Earths
Other
Erratum: Anisotropic etching on Si{1 1 0}: Experiment and simulation for the formation of microstructures with convex corners (Journal of Micromechanics and Microengineering)
Prem Pal
,
M.A. Gosalvez
,
...
,
Y. Xing
(5 authors)
2015 | Institute of Physics Publishing
Conferences
Effect of A-site ionic size variation on TCR and electrical transport properties of (Nd0.7-xLax)0.7Sr0.3MnO3 with x = 0, 0.1 and 0.2
S. Vadnala
,
Prem Pal
,
...
,
Saket Asthana
(4 authors)
2015 | Institute of Physics Publishing
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PDF
Publisher Copy
Reviews
A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching
Prem Pal
and
K. Sato
2015 | Society of Micro and Nano Systems
Download
PDF
Publisher Copy
Articles
Surface and interface studies of RF sputtered HfO2 thin films with working pressure and gas flow ratio
K.C. Das
,
S.P. Ghosh
,
...
,
Prem Pal
,
...
,
J.P. Kar
(10 authors)
2015 | Springer New York LLC
Showing 41-60 of 113 results
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