Publications (113)
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ConferencesOptimization of Controllable Pulsed LASER Deposition Parameters for the Fabrication of Lead Free Ba(Zr0.15Ti0.85)O3 Thin Films2023 | Springer Science and Business Media B.V.- ArticlesStudy of masking layer behavior towards bulk micromachining of Borofloat glass2023 | Elsevier Ltd
- ConferencesEtching Characteristics of Si{110} in NaOH Based Solution2023 | Springer Science and Business Media B.V.
- ConferencesEffect of IPA on Micromachining Characteristics of Silicon in KOH-Based Solution2023 | Springer Science and Business Media B.V.
- ConferencesDeep Grooves in Borofloat Glass by Wet Bulk Micromachining2023 | Springer Science and Business Media B.V.
- ArticlesWet bulk micromachining characteristics of Si{110} in NaOH-based solution2022 | Institute of Physics
- LettersWet anisotropic etching characteristics of Si{111} in NaOH-based solution for silicon bulk micromachining2022 | Society of Micro and Nano Systems
ArticlesFatigue and leakage current characteristics of lead free bilayer thin film structures2022 | Elsevier Ltd- LettersEnhanced etching characteristics of Si{100} in NaOH-based two-component solution2022 | Society of Micro and Nano Systems
- ReviewsHigh speed silicon wet anisotropic etching for applications in bulk micromachining: a review2021 | Society of Micro and Nano Systems
ConferencesA facile way of surface texturing of Si{100} using KOH for silicon solar cells2021 | Institute of Electrical and Electronics Engineers Inc.- ConferencesComparative study of perforated microcantilevers for MEMS applications2021 | Institute of Electrical and Electronics Engineers Inc.
ArticlesInfluence of fabrication tolerances on performance characteristics of a MEMS gyroscope2021 | Springer Science and Business Media Deutschland GmbH
ArticlesExperimental and Theoretical Analysis of Drag Forces in Micromechanical-Beam Arrays2020 | American Physical Society- ConferencesHigh Speed Silicon Wet Bulk Micromachining of Si{111} in KOH Based Solution2020 | Institute of Electrical and Electronics Engineers Inc.
- ArticlesEtching mechanism behind the high-speed etching of silicon in NH2OH-added alkaline solutions2020 | Institute of Electrical Engineers of Japan
- ArticlesSystematic study of the etching characteristics of Si{111} in modified TMAH2020 | Institution of Engineering and Technology
ArticlesPyramid textured Si{100} surface with low reflectivity in CMOS compatible solution2020 | John Wiley and Sons Inc
