Publications (113)
Sort by Year (most recent)
Sort by Year (oldest first)
Sort by Most Cited
Sort by Recently Added
Sort (A-Z)
Sort (Z-A)
ArticlesAnisotropic etching in low-concentration KOH: Effects of surfactant concentration2015 | Institution of Engineering and Technology- ConferencesSmoothness control of wet etched Si{100} surfaces in TMAH+Triton2014 | Trans Tech Publications Ltd
- ArticlesInvestigation of anodic silicon dioxide thin films for microelectromechanical systems applications2014 | Institution of Engineering and Technology
- ArticlesA detailed investigation and explanation of the appearance of different undercut profiles in KOH and TMAH2014 | Institute of Physics Publishing
ArticlesStudy of structural effect on Eu-substituted LSMO manganite for high temperature coefficient of resistance2014 | Elsevier B.V.- ArticlesAnisotropic etching on Si{1 1 0}: Experiment and simulation for the formation of microstructures with convex corners2014 | Institute of Physics Publishing
- LettersA simple and robust model to explain convex corner undercutting in wet bulk micromachining2013 | Society of Micro and Nano Systems
ConferencesMEMS components with perfectly protected edges and corners in Si{110} wafers2011 | IEEE Computer Society- ArticlesExtension of 3D shapes of MEMS structures realized by wet etching (study on micromachining of single crystal silicon)2010 | Japan Society of Mechanical Engineers
