Prem Pal - Research Publications - IIT Hyderabad Research Profile

Publications (113)

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Articles
Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining
B. Tang, M. Shikida, ...,
Prem Pal
, ..., K. Fukuzawa (7 authors)
2010
Articles
Various shapes of silicon freestanding microfluidic channels and microstructures in one-step lithography
Prem Pal
and K. Sato
2009
Articles
Orientation- and concentration-dependent surfactant adsorption on silicon in aqueous alkaline solutions: Explaining the changes in the etch rate, roughness and undercutting for MEMS applications
M.A. Gosálvez, B. Tang,
Prem Pal
, ..., K. Ishibashi (6 authors)
2009
Articles
Suspended Si microstructures over controlled depth micromachined cavities for MEMS based sensing devices
Prem Pal
and K. Sato
2009
Conferences
Surfactant in TMAH for new shapes of silicon MEMS components; its orientation dependent adsorption detected by infrared spectroscopy
Prem Pal
, K. Sato, ..., M. Niwano (7 authors)
2009
Conferences
Adsorbed surfactant thickness on a Si wafer dominating etching properties of TMAH solution
B. Tang, M.A. Gosalvez,
Prem Pal
, ..., K. Sato (7 authors)
2009
Articles
Surfactant adsorption on single-crystal silicon surfaces in tmah solution: Orientation-dependent adsorption detected by in situ infrared spectroscopy
Prem Pal
, K. Sato, ..., S. Itoh (9 authors)
2009
Conferences
Suspended si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching
Prem Pal
, K. Sato and M. Shikida
2009 | Electrochemical Society Inc.
Conferences
Silicon microfluidic channels and microstructures in single photolithography step
Prem Pal
and K. Sato
2009
Articles
Complex three-dimensional structures in Si{1 0 0} using wet bulk micromachining
Prem Pal
and K. Sato
2009
Articles
Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH
Prem Pal
, K. Sato, ..., M.A. Gosálvez (4 authors)
2009
Articles
Ellipsometry study of the adsorbed surfactant thickness on Si{1 1 0} and Si{1 0 0} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH
B. Tang,
Prem Pal
, ..., S. Itoh (7 authors)
2009
Conferences
Wet etched complex three dimensional MEMS structures
Prem Pal
and K. Sato
2009
Conferences
Micromachined sealed cavities by silicon wafer bonding for the formation of microstructures of desired thickness using TMAH etching
Prem Pal
and K. Sato
2008
Conferences
An improved anisotropic wet etching process for the fabrication of silicon MEMS structures using a single etching mask
Prem Pal
, K. Sato, ..., M. Shikida (4 authors)
2008
Conferences
Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching
Prem Pal
, K. Sato, ..., M. Shikida (4 authors)
2008
Conferences
MEMS prototyping using RF sputtered films
S. Chandra, V. Bhatt, ...,
Prem Pal
(5 authors)
2007
Reviews
Fabrication techniques of convex corners in a (100)-silicon wafer using bulk micromachining: A review
Prem Pal
, K. Sato and S. Chandra
2007
Articles
Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants
Prem Pal
, K. Sato, ..., M. Shikida (4 authors)
2007
Conferences
Nano-structured ZnO films by sol-gel process
H. Bahadur, A.K. Srivastava, ...,
Prem Pal
and S. Chandra (13 authors)
2007

Showing 81-100 of 113 results