In this paper, the circular, square and hexagonal perforations of size 2.5 μm-14.5 μm are considered and compared with a simple rectangular beam. Structural and coupled structural-electrostatic analyses are performed using COMSOL Metaphysics to obtain the results. As the perforation size increases, both resonance frequency and static deflection of the beam increase and the pull-in voltage decrease. Among all the proposed designs, design with hexagonal perforation has the highest resonance frequency of 34.5 kHz. Static deflection is found to be greater in beams with circular perforations. Beam with square perforations has the lowest pull-in voltage of 3.84 V. © 2021 IEEE.

Ashok Kumar Pandey

Department of Mechanical and Aerospace Engineering

Prem Pal

Department of Physics

S. Purohit

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Journal	Data powered by Typeset2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021
Publisher	Data powered by TypesetInstitute of Electrical and Electronics Engineers Inc.