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Erratum: Anisotropic etching on Si{1 1 0}: Experiment and simulation for the formation of microstructures with convex corners (Journal of Micromechanics and Microengineering)
Prem Pal
,
M.A. Gosalvez
,
K. Sato
,
H. Hida
,
Y. Xing
Published in Institute of Physics Publishing
2015
DOI:
10.1088/0960-1317/25/4/049601
Volume: 25
Issue: 4
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Journal Details
Authors (1)
About the journal
Journal
Journal of Micromechanics and Microengineering
Publisher
Institute of Physics Publishing
ISSN
09601317
Authors (1)
Prem Pal
Department of Physics
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