In this paper, we investigate low temperature, low pressure and fine-pitch Copper-Copper thermo-compression bonding using an optimized Titanium (Ti) passivation layer. Ultra-Thin Ti layer not only accomplishes the dual role of protecting surface of Cu from oxidation and reducing the effective surface roughness, but also allows the Cu to diffuse. The novelty of this surface passivation approach is the accomplishment of bonding at low temperature of 160° C and pressure to 3.5 KN. The lower bonding temperature and pressure exhibits a very good bond at the interface may give realistic chance to use 3D IC platform. Surface analysis of post patterned Cu/Ti pads were analyzed using X-Ray Photoelectron Spectroscopy (XPS) measurement of the surface corroborates proper passivation of Cu pads. The quality of bonded wafer was tested in Instron microtester measurement system. Also the morphology of bonded wafer was examined using Cross-sectional FE-SEM and Idonus Wafer Bonder IR Inspection (WBI) tool. © 2016 IEEE.

Shiv Govind Singh

Department of Electrical Engineering

Siva Rama Krishna Vanjari

A.K. Panigrahi

S. Bonam

T. Ghosh

Indian Institute of Technology Hyderabad (IITH) is a premier institute of science and technology established in 2008. IITH has been consistently ranked in the&nbsp;<a href="https://iith.ac.in/reports/" rel="noopener noreferrer">top 10 institutes</a>&nbsp;in India for Engineering&nbsp;<a href="https://www.nirfindia.org/2021/EngineeringRanking.html" rel="noopener noreferrer" target="_blank">according to NIRF</a>&nbsp;making it one of the most coveted schools for science and technology in the country.

IITH offers&nbsp;<a href="https://iith.ac.in/academics/under-graduate/">undergraduate programs</a>&nbsp;in all the classical engineering disciplines, applied sciences, design, as well as several modern interdisciplinary areas. Students are given a flexibility to explore a broad set of areas, and potentially pursue a minor or double major in a discipline that is not their own. Students who wish to seek a deeper understanding of their own discipline are strongly encouraged to get involved in cutting-edge research with the help of a faculty to mentor them, and earn an Honors in their own field.

The very foundation of IIT Hyderabad is based on&nbsp;<a href="https://iith.ac.in/research/">research and innovation</a>. The vibrant research culture is evident from the number of patents and publications that IITH produces consistently every year. IITH offers&nbsp;<a href="https://iith.ac.in/academics/programmes-offered/">graduate programs</a>&nbsp;at both a masters, and a doctoral level, in several diverse areas. There are separate programs for technology, design, science, and liberal arts. The&nbsp;<a href="https://iith.ac.in/academics/post-graduate/">MTech program</a>&nbsp;is offered in various modes and durations to cater to the ever-growing need of postgraduate level professionals in the country.

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Journal	Data powered by TypesetProceedings - Electronic Components and Technology Conference
Publisher	Data powered by TypesetInstitute of Electrical and Electronics Engineers Inc.
ISSN	05695503