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Synthesis and characterization of nano silicon and titanium nitride powders using atmospheric microwave plasma technique
S.M. Kumar, K. Murugan, S.B. Chandrasekhar, N. Hebalkar, M. Krishna, B.S. Satyanarayana,
Published in Springer India
2012
Volume: 124
   
Issue: 3
Pages: 557 - 563
Abstract
We have demonstrated a simple, scalable and inexpensive method based on microwave plasma for synthesizing 5 to 10 g/h of nanomaterials. Luminescent nano silicon particles were synthesized by homogenous nucleation of silicon vapour produced by the radial injection of silicon tetrachloride vapour and nano titanium nitride was synthesized by using liquid titanium tetrachloride as the precursor. The synthesized nano silicon and titanium nitride powders were characterized by XRD, XPS, TEM, SEM and BET. The characterization techniques indicated that the synthesized powders were indeed crystalline nanomaterials. © Indian Academy of Sciences.
About the journal
JournalData powered by TypesetJournal of Chemical Sciences
PublisherData powered by TypesetSpringer India
ISSN09743626