We demonstrate SOI slot waveguides for highly sensitive on-chip detection of methane using tunable diode-laser absorption spectroscopy in the mid-infrared. 1.7 ppm limit of detection has been shown with a 1 cm long slot waveguide. © 2022 The Author(s)

Anurup Datta

Department of Mechanical and Aerospace Engineering

H.D. Yallew

M. Vlk

S. Alberti

J. Høvik

A. Aksnes

M.M. Greve

J. Jágerská

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Optics InfoBase Conference Papers

Silicon-on-Insulator (SOI) Slot Waveguide for Methane Absorption Sensing in the Mid-Infrared

Journal	Optics InfoBase Conference Papers
Publisher	Optica Publishing Group (formerly OSA)
ISSN	21622701