An epoxy-based negative photoresist (SU-8) was spin-coated on stainless steel (SS) wafers followed by two-step pyrolysis in inert atmosphere to yield dense carbon films to be used as anodes for lithium (Li) ion batteries. The selection of SS wafer substrates was in accordance with commercial Li ion battery architecture. Cyclic voltammograms confirm the passive layer formation by electrolyte decomposition in the initial cycle. Galvanostatic charge/discharge experiments in the range 0.01-3 V performed at a C-rate=0.1 C confirms the reversible intercalation of Li ions and shows higher gravimetric reversible capacity for these photoresist-derived carbon films on SS wafer substrates than graphite (400 mAh/g vs. 372 mAh/g for graphite). This high reversible capacity may be attributed to high disorder in photoresist derived-carbon as characterized by X-ray diffraction and Raman spectroscopy. ©Copyright 2014 by The Electrochemical Society.All rights reserved.