In this work, an extension of Eringens model for analysis of functionally graded nano plates used in MEMS (micro-electromechanical systems) devices will be presented. Rule of mixtures and Mori-Tanaka methods are adopted for through thickness homogenization of material properties. The role of nonlocal parameter together with the choice of homogenization method is studied in FGM plates. Reddy’s third order shear deformation theory [1] is adopted for the analysis of the plates. The limitations in use of Eringen’s model are also discussed in detail. © 2023, The Author(s), under exclusive license to Springer Nature Switzerland AG.

Amirtham Rajagopal

Department of Civil Engineering

D. Pranavi

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Journal	Mechanisms and Machine Science
Publisher	Springer Science and Business Media B.V.
ISSN	22110984