In this paper, we develop a mathematical model of an electrostatic MEMS beam undergoing impact with a stationary electrode subsequent to pull-in. We model the contact between the beam and the substrate using a nonlinear foundation of springs and dampers. The system partial differential equation (PDE) is converted into coupled nonlinear ordinary differential equations (ODEs) using the Galerkin method. A numerical solution is obtained by treating all nonlinear terms as external forces. Copyright © 2008 by ASME.

Chandrika Prakash Vyasarayani

Department of Mechanical and Aerospace Engineering

E.M. Abdel-Rahman

J. McPhee

S. Birkett

Indian Institute of Technology Hyderabad (IITH) is a premier institute of science and technology established in 2008. IITH has been consistently ranked in the&nbsp;<a href="https://iith.ac.in/reports/" rel="noopener noreferrer">top 10 institutes</a>&nbsp;in India for Engineering&nbsp;<a href="https://www.nirfindia.org/2021/EngineeringRanking.html" rel="noopener noreferrer" target="_blank">according to NIRF</a>&nbsp;making it one of the most coveted schools for science and technology in the country.

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