Determination of dynamic characteristics ofMEMSdevices critically depends on accurate measurements of natural frequency and damping in the device. The natural frequency and damping depend on fabrication process dependent residual stress other than the usual design parameters of the structure. Similarly, perforations provided in the structure for etching purpose have profound effect on the squeeze film damping of the device. In this paper,we first experimentally determine the natural frequency and squeeze film damping in aMEMSdevice, and then present theoretical calculations for computing these quantities that include the effect of residual stress and perforations. © Krishtel eMaging Solutions Private Limited.

Ashok Kumar Pandey

Department of Mechanical and Aerospace Engineering

R. Pratap

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Journal	Advances in Vibration Engineering
ISSN	09725768