High quality capacitive accelerometers with appreciable operation bandwidth are being employed in different high-end defence applications. This paper discusses a novel concept of introducing microchannels in the push-pull capacitive accelerometer structure to control the damping arising due to squeeze film effect. The width and depth of the microchannels are varied to study the damping in the accelerometer structure. The damping factor of accelerometer structure is reduced from 50.2 to 2.51 and its corresponding 3 dB bandwidth is improved from 62.24 to 1.26 kHz due to the introduction of the microchannels. © 2023, The Author(s), under exclusive license to Springer Nature Switzerland AG.

Siva Rama Krishna Vanjari

Department of Electrical Engineering

N. Gupta

S. Dutta

Indian Institute of Technology Hyderabad (IITH) is a premier institute of science and technology established in 2008. IITH has been consistently ranked in the&nbsp;<a href="https://iith.ac.in/reports/" rel="noopener noreferrer">top 10 institutes</a>&nbsp;in India for Engineering&nbsp;<a href="https://www.nirfindia.org/2021/EngineeringRanking.html" rel="noopener noreferrer" target="_blank">according to NIRF</a>&nbsp;making it one of the most coveted schools for science and technology in the country.

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Journal	Mechanisms and Machine Science
Publisher	Springer Science and Business Media B.V.
ISSN	22110984