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Large-Area Gold/Parylene Plasmonic Nanostructures Fabricated by Direct Nanocutting
V. Auzelyte, B. Gallinet, V. Flauraud, C. Santschi, , O.J.F. Martin, J. Brugger
Published in
2013
Volume: 1
   
Issue: 1
Pages: 50 - 54
Abstract
High-resolution multilayer plasmonic nanostructures are made in a single fabrication step by nanocutting a gold and parylene C bilayer. A silicon stamp is used to cut the gold film and vertically displace the nanocut shapes into the polymer. Periodic Au nanopatterns in single and double-layer configurations are fabricated down to the sub-100 nm range, supporting plasmon resonances in the visible range. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
About the journal
JournalAdvanced Optical Materials
ISSN21951071