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High performance printed oxide field-effect transistors processed using photonic curing
, G.C. Marques, J.S. Gebauer, S. Dehm, M. Bruns, M. Winterer, M.B. Tahoori, J. Aghassi-Hagmann, H. Hahn, S. Dasgupta
Published in Institute of Physics Publishing
2018
PMID: 29553481
Volume: 29
   
Issue: 23
Abstract
Oxide semiconductors are highly promising candidates for the most awaited, next-generation electronics, namely, printed electronics. As a fabrication route for the solution-processed/printed oxide semiconductors, photonic curing is becoming increasingly popular, as compared to the conventional thermal curing method; the former offers numerous advantages over the latter, such as low process temperatures and short exposure time and thereby, high throughput compatibility. Here, using dissimilar photonic curing concepts (UV-visible light and UV-laser), we demonstrate facile fabrication of high performance In2O3 field-effect transistors (FETs). Beside the processing related issues (temperature, time etc.), the other known limitation of oxide electronics is the lack of high performance p-type semiconductors, which can be bypassed using unipolar logics from high mobility n-type semiconductors alone. Interestingly, here we have found that our chosen distinct photonic curing methods can offer a large variation in threshold voltage, when they are fabricated from the same precursor ink. Consequently, both depletion and enhancement-mode devices have been achieved which can be used as the pull-up and pull-down transistors in unipolar inverters. The present device fabrication recipe demonstrates fast processing of low operation voltage, high performance FETs with large threshold voltage tunability. © 2018 IOP Publishing Ltd.
About the journal
JournalNanotechnology
PublisherInstitute of Physics Publishing
ISSN09574484