The characteristics of surface roughness span a range of length scales determined by the nature of the surface generation process. The mechanism by which material is removed at a length scale determines the roughness at that scale. Electropolishing preferentially reduces the peaks of surface protuberances at sub-micron length scales to produce smooth surfaces. The material removal in electropolishing occurs by two different mechanisms of anodic leveling and microsmoothing. Due to insufficient lateral resolution, individual contribution of these two mechanisms could not be measured by conventional roughness measurement techniques and parameters. In this work, we utilize the high lateral resolution offered by Atomic force microscopy along with the power spectral density method of characterization, to study the evolution of roughness during electropolishing. The power spectral density show two corner frequencies indicating the length scales over which the two mechanisms operate. These characteristic frequencies are found to be a function of the electropolishing time and hence can be used to optimize the electropolishing process. © Springer Science+Business Media New York 2014.