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Erratum: Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation (Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics (2021) 39 (054202) DOI: 10.1116/6.0001084)
C. Bessouet, S. Lemettre, C. Kutyla, A. Bosseboeuf, P. Coste, T. Sauvage, H. Lecoq, O. Wendling, A. Bellamy, Show More
Published in AVS Science and Technology Society
2021
Volume: 39
   
Issue: 6
Abstract
In the following, we address a couple of mistakes found in the recently published article. (i) The yttrium oxide peak in Fig. 3 in Ref. 1 was incorrectly indexed as 111 instead of 222. (ii) As per the rules of the International Union of Crystallography, the use of parentheses (to indicate lattice planes) in indexing the diffraction peaks in Figs. 3 and 9 is now dropped. The correct indexing of the diffraction peaks shown in Figs. 3 and 9 is provided below. The figure captions remain the same. The next-to-last sentence in the first paragraph on pg. 054202-4 should read, “The shift in the peak positions of 222 Y2O3 and 002 Y after annealing is also evident from XRD measurements.” The discussion and conclusions based on the figures remains unchanged. (Figure Presented). © 2021 AVS Science and Technology Society. All rights reserved.
About the journal
JournalJournal of Vacuum Science and Technology B
PublisherAVS Science and Technology Society
ISSN21662746