A new mathematical model for the combined slanting and scalloping defect, seen in the microelectromechanical systems (MEMS), has been suggested. This defect is observed in the high aspect ratio systems that are generally manufactured using the ‘Bosch Process’. Prior to this, the analytical model of a vibratory ring gyroscope (VRG), including the nonlinear terms, is delved into, considering the outer thin ring resonator. Its linear form is compared and analyzed with the finite element analysis in ANSYS. The impact of the aforesaid defect on the dynamics of a VRG is plotted with the help of MATLAB, applying the linear form of the expressions. © 2022, The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.