Oxidative decomposition of dilute benzene in air was carried out in a dielectric barrier discharge reactor with inner metal fiber electrode that was later modified with transition metal oxides. Typical results indicated the best performance of the designed reactor for the removal of dilute benzene, where conventional techniques may not be efficient. The introduction of transition metal oxides in the discharge zone increased the conversion of benzene and shifted the product distribution to total oxidation. The performance of the reactor was further improved on humidification of air stream. The better performance of MnOx/SMF over CoOx and SMF may be due to in situ decomposition of ozone that may lead to the formation of strong oxidant atomic oxygen, whereas the best performance with TiO2/MnOx/SMF may be assigned due to the synergy between ozone decomposition on MnOx surface and photocatalytic action on TiO2. © 2013 Islamic Azad University (IAU).