In this paper we propose a few helium ion microscope (HIM)-based methods for sample preparation and modification. In particular we report the use of the HIM to make thin wedge SrTiO3 samples without significant artifacts, the possibility to reshape thin metal lines on an electron transparent membrane and the new method of HIM sample preparation by in situ heating of the samples during He-beam illumination. © 2012 Materials Research Society.

Sai Rama Krishna Malladi

Department of Materials Science and Metallurgical Engineering

M. Rudneva

E. Van Veldhoven

D. Maas

H.W. Zandbergen

Indian Institute of Technology Hyderabad (IITH) is a premier institute of science and technology established in 2008. IITH has been consistently ranked in the&nbsp;<a href="https://iith.ac.in/reports/" rel="noopener noreferrer">top 10 institutes</a>&nbsp;in India for Engineering&nbsp;<a href="https://www.nirfindia.org/2021/EngineeringRanking.html" rel="noopener noreferrer" target="_blank">according to NIRF</a>&nbsp;making it one of the most coveted schools for science and technology in the country.

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Journal	Materials Research Society Symposium Proceedings
ISSN	02729172